中文摘要：

研究在微波段具有高磁导率和大磁损耗的CoFeZrRE薄膜,采用射频磁控溅射工艺制备该类薄膜,探讨了工艺参数和薄膜厚度对CoFeZrRE薄膜结构和电磁性能的影响.重点研究了掺杂稀土元素的含量和种类对薄膜磁各向异性、饱和磁化强度等基本磁参量以及微波磁导率和磁损耗的影响.结果表明,重稀土元素（如Dy,Tb）提高微波磁损耗的效果更显著;CoFeZrRE类薄膜具有较高的微波磁导率和磁损耗（2 GHz处,μ＇和μ＂均高于200）,有望在微波吸收和抗电磁干扰领域获得广泛应用.

英文摘要：

CoFeZrRE films with large permeability and magnetic loss in the microwave frequency were synthesized by magnetron sputtering. The effects of technology details and film thickness on the magnetic structure and properties were discussed. Influences of RE adding contents and variety on anisotropy, magnetization, microwave permeability and magnetic loss were investigated particularly. Results show that the role of heavy RE elements （such as Dy, Tb） on the improvement of microwave loss is more remarkable and the CoFeZrRE films may present large microwave permeability and magnetic loss （μ′ and μ″ all are larger than 200 at 2 GHz）. In conclusion, it is possible for these films to be applied in the fields of microwave absorption and EMI suppression.