中文摘要：

计算机硬盘中盘片的转速和存储密度的急剧增加，对读写磁头的定位精度和寻道速度提出了更高的要求，而高速旋转的盘片带动的风扰引起磁头悬臂结构的振动直接影响到其定位精度和速度。该文利用PZT压电陶瓷传感器和驱动器实现对读写磁头悬壁结构振动的主动控制。首先利用Ansys软件对附带有PZT传感器和驱动器的硬盘磁头悬臂结构进行了灵敏度和动态特性的分析，然后对系统进行了辨识并设计了H∞鲁棒控制器，完成了初步的振动控制实验，取得了较好的控制效果。

英文摘要：

The rotation speed and the storage density of the disk in hard disk drivers are increasing rapidly and of course the speed of read and write data in disk is also improved quickly. Therefore, the requirement for positional precision and tracking speed of the R/W magnetic head fixed on the suspended access arm is also much higher than before. The micro-amplitude vibration of the arm excited by the air flow, which generated by the high speed rotation of the disk, was the main factor affected the positional precision and tracking speed. In this paper,micro PZT sensor and actuator were selected to implement the active control of the micro-vibration of the arm. First, the suspended access arm integrated with the PZT sensor and actuator was analyzed by finite element software ANSYS on the sensitivity and modal characteristics. Then the H∞ robust controller was designed and simulated and the vibration control experiment was carried out under different conditions of actuated signals. Experiments showed that the micro-amplitude vibration of the suspended access arm could be controlled ideally by the micro-PZT actuator.