欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
使用补偿朗缪尔探针诊断技术,研究了60 MHz/13.56 MHz双频激发容性耦合等离子体的空间电子行为,得到了电子能量概率函数（EEPF）随径向位置和低频输入功率的演变行为.实验结果表明,13.56 MHz射频输入功率的变化主要影响低能电子的布居,其影响随气压升高而加大.在等离子体放电中心以外,EEPF呈现出双峰分布的特性,同时发现从放电中心到极板边缘,次能峰有逐渐向高能区漂移的现象,次能峰的出现显示了中能电子的增强的加热效应.通过EEPF方法,计算了等离子体的电子温度、电子密度.讨论了等离子体中的电子加热机理.
英文摘要：
Dual-frequency capacitively coupled plasma（DF-CCP） driven by two frequencies of 60MHz and 13.56MHz was studied using compensated Langmuir probe technique.The change of EEPF with radial position and low-frequency input power was obtained.The experimental result shows that the input power of 13.56MHz mainly affects the population of low-energy electrons and the effect becomes greater when the gas pressure increases.The EEPF exhibits a structure of bi-energy-peak beyond the centre of discharge.The second energy peak drifts to the region of higher electron energy from the centre to the edge of electrode.The emergence of second energy peak could be attributed to the enhanced heating of middle-energy electrons.The electron density and electron temperature were calculated using EEPF.The plasma electron heating mechanism was discussed.
同期刊论文项目
同项目期刊论文
E?ect of Low-frequency Power on F, CF2 Relative Density and F/CF2 Ratio in Fluorocarbon Dual-Frequen
Effect of C:F Deposition on Etching of SiCOH Low-k Films in CHF3 60 MHz/2 MHz Dual-Frequency Capacit
Effect of high-frequency on etching of SiCOH films in CHF3 dual-frequency capacitively coupled plasm
Formation of SiC Nanostruture Using Hexamethyldisiloxane During Plasma-Assisted Hot-Filament Chemica
Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/C
Fluid simulation for influence of metastable atoms on the characteristics of capacitively coupled ar
Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric ge
Effect of bias in patterning diamond by a dual electron cyclotron resonance–radio-frequency oxygen p
Effects of matching network on the hysteresis during E and H mode transitions in argon inductively c
The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by su
Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacit
Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capac
One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Dischar
Spectroscopic study on rotational and vibrational temperature of N2 and N2 + in dual-frequency capac
Response to “Comment on ‘Influence of exciting frequency on gas and ion rotational temperatures of n
Parallelization and optimization of electrostatic Particle-in-Cell/Monte-Carlo Coupled codes as appl
Numerical results for the Ar and CF4 mixture gas in a dual frequency capacitively coupled plasma usi
Influence of the low-frequency source parameters on the plasma characteristics in a dual frequency c
The influence of Exciting Frequency on N2 and N+2 Vibrational Temperature of Nitrogen Capacitively C
Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency ca
Effect of substrate facets on homoepitaxial growth of diamonds during plasma-assisted hot filament c
Two-dimensional fluid model of pulse sheath in plasma immersion ion implantation with dielectric sub
Coupling effect of electron cyclotron resonance hydrogen plasma and dc biasing in fabricating diamon
Effect of Discharge Parameters on Properties of Diamond-Like Carbon Films Prepared by Dual-Frequency
The influence of Exciting Frequency on N-2 and N-2(+) Vibrational Temperature of Nitrogen Capacitive
A simplified collisional-radiative model for characterization of a low pressure capacitively coupled
Influence of exciting frequency on gas and ion rotational temperatures of nitrogen capacitively coup
Spectroscopic study on rotational and vibrational temperature of N-2 and N-2(+) in dual-frequency ca
Investigation on capacitively coupled argon plasma driven by dual frequency with different frequency
Response to "Comment on 'Influence of exciting frequency on gas and ion rotational temperatures of n
Effect of 13.56 MHz low-frequency power on electrical characteristic of 60 MHz radio-frequency capac
期刊信息
位置：