中文摘要：

共焦显微镜因其高分辨率和能三维立体成像的优点被广泛应用在生物、医疗、半导体等方面。文章首先分析了影响共焦显微镜分辨率的因素，主要有光源、探测器孔径和杂散光等；并结合这些因素介绍了双光子共焦显微镜、彩色共焦显微镜、荧光共焦显微镜、光纤共焦显微镜；然后从提高系统成像速度的方面介绍了波分复用共焦显微镜和频分复用共焦显微镜；最后分析了共焦显微镜的发展趋势。

英文摘要：

Confocal microscope is widely applied in biology, medicine, semiconductor because of the advantages of high resolution and 3D imaging. This paper first analyzes the elements, such as light source, dectector aperture and scattering light, which have an effect on the resolution. Meanwhile, some high resolution eonfocal microscopes are discussed, such as two-photon confoeal microscope, chromatic confoea] microscope, fluorescence confocat microscope, fiber-optic confocal microscope and so on. Then based on improving the imaging speed, wavelength division multiplexed confocal microscope and frequency division multiplexed eonfoeal microscope are also introduced. Finally, the prospects of confocal microscope are described.