中文摘要：

以K9和熔石英玻璃为基底结合溶胶-凝胶镀膜技术,制备了用于负载1 064nm和355nm激光辐射的高损伤阈值透射玻璃元件。综合考虑基底表面和亚表面质量及薄膜质量,系统分析了影响激光损伤阈值的因素,并通过基底加工与薄膜改性的结合大幅提高了元件的损伤阈值。在薄膜改性方面,采用溶胶内添加聚乙二醇和氨气氛处理相结合的方法,使薄膜的结构缺陷减少,孔径分布更合理,所得薄膜的抗激光损伤能力远大于未处理的基底的。在基底加工方面,采用超级抛光和化学腐蚀的方法获得了超光滑表面和低缺陷亚表面,使用于红外波段的K9玻璃和紫外波段的熔石英玻璃的激光损伤阈值分别提高到原来的1.3和4.1倍。将上述改性后的薄膜镀在改性后的基底上,所得透射元件的激光损伤阈值不小于相应基底的。

英文摘要：

Transmissive optics with high laser-induced damage threshold（LIDT）were prepared,with K9and silica glass as substrates that were coated with sol-gel porous silica coatings,for 1 064nm and 355nm laser irradiation.The factors that effect LIDT were systematically analyzed considering both the coating and substrate qualities.The LIDTs of the optics substantially increase by combining the substrate treating and film modification.The film modification was realized by two steps,that is,modifying thesilica sol with polyethylene glycol and coating with ammonia treatment.The film eventually features less structural defects and better uniformity,and presents stronger ability of resisting laser damage than the substrate without any treatment.As for the substrate treatment,chemical etching and super-polishing were employed to obtain super smooth surface and less-defects subsurface,which resulted in an increase in the LIDT of K9glass（at 1 064nm）by 1.3times and that of silica glass（at 355nm）by 4.1times.The LIDTs of this optics don’t decrease after the treated glass were coated with the modified films,meaning that the LIDTs of the modified films are high enough to match the treated substrates.