中文摘要：

提出了一种液压油污染物多参数测量传感器,该传感器在平面型微流体电感传感器基础上增加了一个单层电感线圈,并将两个单层线圈正对排布在直微通道两侧,在电感参数检测的基础上将两个单层电感线圈等效为一对圆环形电容极板,引入了电容参数检测,从而实现了对液压油中铁磁性金属颗粒、非铁磁性金属颗粒、水滴和气泡4种污染物的检测。对该多参数传感器进行了设计,并结合仿真和实验对检测位置进行了优化,电容参数检测实验实现了液压油中180μm水滴和240μm气泡的区分检测;电感参数检测实验实现了液压油中80μm铁颗粒和150μm铜颗粒的区分检测。该研究对液压油多污染物的区分检测提供了一种新方法。

英文摘要：

A muhi-parameter measurement sensor for hydraulic oil pollutants is proposed. Based on the planar microfluidic inductance sensor, a single layer inductance coil is added in the sensor. Two single-layer coils are arranged on both sides of the straight micro- channel. On the basis of inductance parameter detection, the two single-layer inductor coils are equivalent to a pair of ring shaped capacitor plates, the capacitance parameter detection is introduced, and the muhi-parameter sensor achieves the detection of four pollutants （ferromagnetic metal particles, non-ferromagnetic metal particles, water droplets and air bubbles） in the hydraulic oil. The design of multi-parameter sensor was carried out, and the detection position was optimized through simulation and experiments. The capacitance parameter detection experiment realizes the differential detection of 180 μm water droplets and 240 μm air bubbles; and the inductance parameter detection experiment realizes the differential detection of 80μm iron particles and 150 μm copper particles in hydraulic oil, respectively. The study provides a new approach for the differential detection of multi-pollutants in hydraulic oil.