运用原子力显微镜纳米加工系统,在工件表面加工出了多种复杂微结构。并以此为基底,研究了基底形貌对嵌段共聚物自组装纳米微结构的调控作用。将自上而下的基于AFM微探针的纳米机械技术与自下而上的分子自组装技术相结合,实现了对有序纳米微结构的调控。
Manipulate the atomic force microscope (AFM) to machine many sorts of micro-structures on the sample surface. Based on this etched substrate, the controlling effects of block copolymer self-assembling are studied and presented. Combination of the AFM-based top-down nanomachining and bottom-up self-assembly methods, controlling of the ordered nano-structure is achieved.