中文摘要：

基于压电原理，在考虑黏着、微凸体间相互作用、基底弹塑性变形及微悬臂梁弹性恢复等基础上，运用ABAQUS动态模拟分析了压电薄膜驱动下微悬臂梁末端与基底粗糙面间的接触。结果表明：每次压电驱动接触过程中均存在数次明显的接触一分离情形，梁与基底在无电压作用后2～4μs内仍出现黏合，分离期间粗糙表面发生小部分的弹塑性变形，其中最大残余应力值处于接触区域边缘；随着压电驱动次数的增加，基底发生塑性变形区域不断向两边扩展，表面间黏合作用增强，影响系统接触的可靠性。

英文摘要：

Based on the piezoelectric principle, in consideration of adhesion, interaction between asperities, elastic-plastic deformation of the substrate, microcantilever elastic recovery and so on, the dynamic characteristics between microcantilever and the substrate rough surface driven by piezoelectric were simulated by using ABAQUS finite element software. The results showed that there were several significant contact-separation cases during the contact process of each piezoelectric driving. When no voltage was applied for 2 - 4 txs, bonding between beam and the substrate still appeared. A small portion of the elastic-plastic deformation on the rough surface occurred during separation, and the maximum residual stress appeared at the edge of the contact area. With the increase of piezoelectric driving times, the effect of surface bonding enhanced and the plastic deformation region on the substrate rough surface extended to two sides continuously, which influenced the reliability of the contact system.