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A Novel Quartz Crystal Capacitive Sensor for Micro Displacement Detection
  • 期刊名称：IEEE Sensors Journal, Volume: 12 , Issue: 6, 2145
  • 时间：2012
  • 页码：2145-2149
  • 相关项目：基于压阻硅桥的新型MEMS气体传感器集成阵列研究
作者： Han Lei|Xiangdong Chen|Yao Yao|Xiaoyu Li|
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基于压阻硅桥的新型MEMS气体传感器集成阵列研究
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