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Conversion of strain state from biaxial to uniaxial in strained silicon
  • ISSN号：0003-6951
  • 期刊名称：Applied Physics Letters
  • 时间：0
  • 页码：1-3
  • 相关项目：应变硅/硅锗微细特征单元结构失稳及应变弛豫研究
作者： Ma, Fei|Zhang, Tian-Wei|Xu, Ke-Wei|Chu, Paul K.|
同期刊论文项目
应变硅/硅锗微细特征单元结构失稳及应变弛豫研究
期刊论文 18
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