中文摘要：

微制造是微机电系统的基础，本文提出了一种掺粉电解复合抛光新工艺方法，将微细磨料均匀掺入电解液中．依靠微型高速主轴带动工具超高速旋转搅动磨料，对工件进行“软磨削”去除表面钝化膜，然后通过电解作用实现对工件的抛光．本文介绍了掺粉微细电解复合抛光的加工原理和实验装置，系统研究了掺粉粒度、浓度和电极转速等对抛光质量的影响，同时研究了电源峰值电压、脉冲宽度和占空比等参数对加工的影响，并获得其工艺规律曲线．在上述总结的最佳工艺参数条件下，进行了微细三维结构零件抛光，加工出的微细螺旋轴直径为Ф100μm，表面粗糙度Ra0．02μm的近似镜面效果．

英文摘要：

Micro machining is the base of MEMS, a new process-Micro-Electrochemical Polishing Mixed with Powder （EPMP） is presented in this paper. The micro abrasives was put into electrolyte, High-speed rotation of the took drive abrasive movement, the passivation film of workpiece surface was removed by the abrasive, then the workpiece was polished by ECM. This paper introduce the process principle of EPMP and experiment device, the relationship between polishing quality and parameters, including mixed powder granularity, concentration, rota- tional speed of shaft, peak voltage, pulse-width and duty cycle, and process curves has been obtained. Finally, ex- periments of EPMP have been carried out based on above optimized machining parameters, and a micro-screw- shaft of Ф100μm has been polished. Which is near to mirror effect （Ra=0.02μm）.