中文摘要：

以发展微光学元件制作新方法为目标，提出利用误差扩散编码方法设计灰阶编码掩模制作微光学元件。此方法同其他编码方法相比，具有量化效果好、衍射效率高、制作文件小、计算速度快、通用性好等优点。用此方法对制作微透镜的掩模进行了设计，利用预校正法和边缘增强法相结合的方法对掩模进行了优化，并对曝光、显影过程进行了模拟，得到了满意的结果。

英文摘要：

With the aim of developing fabrication methods of micro-optics, encoding gray-tone mask by error-diffusion method for fabrication of micro-optics elements is proposed. Compared with the other encoding methods, error-diffusion method has many metrics, such as fast computation, good quantization quality, high diffraction efficiency, and small fabrication size and so on. Suggested by this, a new error-diffusion coding method is presented to design the coding gray-tone mask in order to avoid the disadvantage that is designed by Lohmann＇s encoding method. And a satisfying simulation result is obtained with the designed coding gray-tone mask.