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A virtual metrology model based on recursive canonical variate analysis with applications to sputter
  • ISSN号：0959-1524
  • 期刊名称：Journal of Process Control
  • 时间：0
  • 页码：830-839
  • 相关项目：基于局部建模的大范围工况系统优化控制
作者： Pan, Tian-Hong|Sheng, Bi-Qi|Wong, David Shan-Hill|Jang, Shi-Shang|
同期刊论文项目
基于局部建模的大范围工况系统优化控制
期刊论文 29 会议论文 9 专利 6
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