中文摘要：

航空航天和船舶工业的迅速发展,对直线导轨运动控制精度的要求越来越高,实现高速、高精度操作成为衡量一个控制系统的重要性能指标.针对正交直线导轨垂直度误差的标定问题进行了系统、深入地研究.将测头固定于正交导轨负载终端,对高精度方箱以等间距方式测量获得两个导轨各自的直线度误差数据,经最小二乘法拟合得到直线度误差曲线斜率,计算其垂直度误差.采用在线检测方式可大幅提高标定效率,且标定工具只需一个测头和高精度方箱,标定成本较低、易操作,可根据不同控制精度要求更换测头,灵活度大.大量实验和数据证明了该标定方法的有效性和可行性.

英文摘要：

The demand of control accuracy becomes increasingly high about straight rails with the development of acrospace and shipbuilding industry. So precision control in high speed becomes a fatal performance parametei about controlling system. The problem of perpendicularity error calibration is researched systematically and deeply. Probe is fazed on the terminal of orthogonal guides so that the precision square box can be measured in the same step length by the probe through the motion of orthogonal guides. The test data is processed by the least square method to get the straightness error and the slope of error curves and calculate perpendicularity error lastly. The on-line calibration will improve efficiency greatly. It has these advantages of low cost and easy operation because that a probe and a square box in high accuracy are applied in this method. It can easily realize calibration by changing probe according to the requirement of control accuracy. A lot of experiments and data have demonstrated the effectiveness and feasibility of the calibration way.