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Di-electrophoresis assembly and fabrication of SWCNT field-effect transistor
  • ISSN号:0023-074X
  • 期刊名称:《科学通报》
  • 时间:0
  • 分类:O623.21[理学—有机化学;理学—化学] TB383[一般工业技术—材料科学与工程]
  • 作者机构:[1]State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China, [2]Department of Mechanical Engineering, University of Arkansas, Fayetteville, AR 72701, USA
  • 相关基金:Supported by the National High-Tech Research & Development Program of China (Grant No. 2006AA04Z320), and Kwan-cheng Wong Research Fellowship, Chinese Academy of Sciences, China The authors gratefully acknowledge the support of K. C. Wong Education Foundation, Hong Kong. And we thank the research group of Prof H. M. Cheng (Institute of Metal Research, Chinese Academy of Sciences) for providing SWCNT materials. We are also grateful to Deng Jianguo in CETC No. 13 Institute and Prof Li Ting from Department of Microelectronics, Peking Universityfor the assistance in microelectrode chip fabrication by. In addition, Asso. Prof. Tian thanks the reviewers for their valuable suggestions and advice.
中文摘要:

在制作 nano 的进程电的设备或系统基于围单人赛的碳, SWCNT 地效果晶体管(SWCNT 联邦货物税) 的 nanotube (SWCNT ) ,可控制的汇编和制造是一个关键问题。SWCNT 联邦货物税是最在 nano 电子学的基本、重要的部件。在背门联邦货物税的微电极薄片被设计并且制作以后, di 电气泳动技术被采用认识到 SWCNT 的可控制的排列和集会,基于驱散由便于的钠 dodecyl 硫酸盐(SDS ) 的 SWCNT 由离心的技术的 ultra-sonication 技术和搬迁杂质。SWCNT 汇编的实验证明 SWCNT 与与 di 电气泳动持续时间和解决方案集中将近成正比的排列密度在微电极差距一致地被排列并且集合。在清洗,弄干并且改善的过程以后,在装配 SWCNT 之中的金属性的 SWCNT 被烧坏,剩余 SDS 被移开,并且 SWCNT 联邦货物税的完美的地效果性能最后被获得。

英文摘要:

In the process of fabricating nano electrical device or system based on single-walled carbon nanotube (SWCNT), the controllable assembly and fabrication of SWCNT field-effect transistor (SWCNT FET) is a key issue. SWCNT FET is the most basic and important component in nano electronics. After microelectrode chip of back-gate FET is designed and fabricated, di-electrophoresis technology is adopted to realize the controllable alignment and assembly of SWCNTs, based on dispersing SWCNT by sodium dodecyl sulphate (SDS) facilitated ultra-sonication technique and removing impurities by centrifugal technique. The experiments of SWCNTs assembly demonstrate that SWCNTs are aligned and assembled uniformly at the microelectrodes gap with the alignment density nearly proportional to di-electrophoresis duration and solution concentration. After the processes of rinsing, drying and improving, metallic SWCNTs among the assembled SWCNTs are burned out and residual SDS is removed, and perfect field-effect performance of SWCNT FET is eventually obtained.

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期刊信息
  • 《科学通报》
  • 北大核心期刊(2011版)
  • 主管单位:中国科学院
  • 主办单位:中国科学院
  • 主编:周光召
  • 地址:北京东黄城根北街16号
  • 邮编:100717
  • 邮箱:csb@scichina.org
  • 电话:010-64036120 64012686
  • 国际标准刊号:ISSN:0023-074X
  • 国内统一刊号:ISSN:11-1784/N
  • 邮发代号:80-213
  • 获奖情况:
  • 首届国家期刊奖,中国期刊方阵“双高”期刊,第三届中国出版政府奖
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  • 美国化学文摘(网络版),美国数学评论(网络版),美国工程索引,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊(2004版),中国北大核心期刊(2008版),中国北大核心期刊(2011版),中国北大核心期刊(2014版),中国北大核心期刊(2000版)
  • 被引量:81792