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Design, Analysis and Testing of a Parallel-kinematic High-bandwidth XY Nanopositioning Stage
  • ISSN号：0034-6748
  • 期刊名称：Review of Scientific Instruments
  • 时间：2013
  • 页码：-
  • 相关项目：微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
作者： Li CX|Gu GY|Yang MJ|Zhu LM|
同期刊论文项目
微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
期刊论文 45 会议论文 27
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