中文摘要：

为解决大功率半导体激光阵列快轴准直镜装调缺乏定量研究的问题,利用光线传输矩阵法和CCD成像法,获得其准直后光束的指向和发散角.对比半导体远场特性分析仪测量准直后的残余发散角可知,利用光线传输矩阵法和CCD成像法测量角度,测量误差可以控制在13%以内,CCD成像法可作为调整半导体激光阵列准直的有效监测手段.同时,测试6个自由度上准直镜的位置对快轴准直的影响,分析各轴上准直镜位置的允许偏差量,为全自动装调快轴准直镜的算法优化提供了实验基础.结果表明：快轴准直镜装调对各轴运动精度要求不同,尤其对y轴运动精度要求最高.

英文摘要：

To quantitative research the micro-collimator position on the influence of divergence Angle of high-power diode laser array, light transmission matrix and CCD imaging method were used to measure the beam pointing and divergence angle of collimated diode laser array. Compared with far-field characteristics of diode laser analyzer measure the residual divergence angle, it can be know that the position adjustment of collimator can be monitored effectively by CCD imaging method, and the deviation of divergence angle can be controlled within 13%. Meanwhile, to optimize algorithm and provide experiment basis in fully automatic assemble fast axis collimation, the influences of the six degrees of freedom on the positional deviation of fast axis collimation on the divergence angle were tested, and the tolerance value of each axis for collimator was analysized. Results show that the required solution of each axis are different for assembling fast axis collimator, and the y axis requires the highest solution.