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Tiny MEMS-Based Pressure Sensors in the Measurement of Intracranial Pressure
  • ISSN号：1674-4926
  • 期刊名称：《半导体学报：英文版》
  • 时间：0
  • 分类：O29[理学—应用数学;理学—数学] TP212[自动化与计算机技术—控制科学与工程;自动化与计算机技术—检测技术与自动化装置]
  • 作者机构：[1]with the Institute of Microelectronics, Tsinghua University, Beijing 100084, China., [2]with the Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 100083, China
  • 相关基金：supported by the National Natural Science Foundation of China (Nos. 61025021 and 61020106006);the National Key Projects of Science and Technology of China (No. 2011ZX02403-002)
作者： Yanhang Zhang[1,2], Zhaohua Zhang[1], Bo Pang[1], Li Yuan[1], Tianling Ren[1]
关键词： 微型压力传感器, 测量方法, MEMS, 颅内压, 压阻式压力传感器, 类型检测, 芯片尺寸, 有限元分析, intracranial pressure, tiny sensors, finite element analysis
中文摘要：

This study presents a tiny pressure sensor which is used to measure the Intracranial Pressure(ICP). The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming optimizing and Finite Element Analysis(FEA) tools. Two kinds of sensor sizes are designed in the case of childhood and adult. The sensors are fabricated by Microelectro Mechanical Systems(MEMS)process. The test results yield sensitivities of 1.033 10 2mV/kPa for the childhood type detection and 1.257 10 2mV/kPa for the adult detection with sensor chip sizes of 0.40 0.40 mm2and 0.50 0.50 mm2,respectively. A novel method for measuring ICP is proposed because of the tiny sizes. Furthermore,relative errors for sensitivity of pressure sensors are limited within 4.76%. Minimum Detectable Pressure(MDP) reaches 128.4 Pa in average.

英文摘要：

This study presents a tiny pressure sensor which is used to measure the Intracranial Pressure （ICP）. The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming optimizing and Finite Element Analysis （FEA） tools. Two kinds of sensor sizes are designed in the case of childhood and adult. The sensors are fabricated by Microelectro Mechanical Systems （MEMS） process. The test results yield sensitivities of 1.033x 10-2 mV/kPa for the childhood type detection and 1.257x 10-2 mV/kPa for the adult detection with sensor chip sizes of 0.40x0.40 mm2 and 0.50x0.50 mm2, respectively. A novel method for measuring ICP is proposed because of the tiny sizes. Furthermore, relative errors for sensitivity of pressure sensors are limited within 4.76%. Minimum Detectable Pressure （MDP） reaches 128.4 Pa in average.

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期刊信息
  • 《半导体学报：英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国电子学会 中国科学院半导体研究所
  • 主编：李树深
  • 地址：北京912信箱
  • 邮编：100083
  • 邮箱：cjs@semi.ac.cn
  • 电话：010-82304277
  • 国际标准刊号：ISSN：1674-4926
  • 国内统一刊号：ISSN：11-5781/TN
  • 邮发代号:2-184
  • 获奖情况:
  • 90年获中科院优秀期刊二等奖,92年获国家科委、中共中央宣传部和国家新闻出版署...,97年国家科委、中共中央中宣传部和国家新出版署三等奖,中国期刊方阵“双效”期刊
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  • 被引量:7754