本文以异丙醇钛为原料,采用金属有机化学气相沉积(MOCVD)方法在310S不锈钢表面制备不同厚度TiO2涂层,并采用扫描电镜、能量散射X射线光谱表征了涂层的表面形貌和元素组成。结果表明:沉积所得涂层平整、均匀,临界厚度约2μm;涂层厚度随沉积时间增加而增加,基体元素Cr、Fe、Ni含量逐渐降低,涂层基本完全覆盖基体表面。采用X射线衍射仪表征了涂层结焦评价前后的晶型变化,结果表明:在沉积温度为250℃时,涂层呈无定型结构;经过环己烷常压800℃高温裂解结焦评价后,涂层表面出现锐钛矿晶型,且表面结焦引起的FexCy谱峰消失,结焦抑制率最大可达到64%。因此,具有一定厚度的TiO2涂层能够有效阻断结焦前驱体与金属基体中Fe、Ni元素的接触,从而有效抑制金属催化结焦。
With titanium isopropoxide(TTIP)as reaction precursor, TiO2 coatings were prepared on the surface of 310S stainless steel by metal organic chemical vapor deposition. Scanning electron microscopy and energy dispersive X-ray spectroscopy were used to study the surface morphology and chemical compositions of this coating. It was indicated that the flat and uniform of deposited coating with a 2pm critical thickness,and with the increasing of deposition time the coating can cover the substrate completely with the atomic percentages of Cr,Fe,Ni constantly decrease. The changes of crystal morphology of the TiO2 coating before and after co-king test was characterized by X-ray diffraction and the amorphous coating deposited at 250^ gradually transforms to anatase struc-ture after coking test at 800%^ ,and at the same time the FexCy peaks caused by coking disappeared with the maximum anti-coking ratio reaching 64%. Consequently,the TiO2 coating with a certain thickness can prevent the contact of the coke precursor and metal particles(Fe, Ni), effectively inhibi ting the formation of metal catalytic coke.