中文摘要：

silicon-on-insulator 2 脳 2 Mach-Zehnder thermo 光的开关基于强烈指导的配对的 multimode 干扰 couplers 被开发。multimode 干扰 couplers 为改进象 self-imaging 质量，一致性和制造忍耐那样的 coupler 特征深深地被蚀刻。建议开关完成好表演，包括低插入损失 ? 11.0dB，联合损失的纤维波导 ? 4.3dB 和快反应速度测量了分别地是为加薪和秋天切换时间的 3.5 和 8.8 渭 s。国家鈥 ? 部分地支持的 CLC 数字 TN256 73 鈥 ? 计划(没有。G2000-03-66 和 No.2006CB921702 ) ，中国(号码 10674185 ) 的国家自然科学基础 .and 为国籍的中央大学的科学基础(没有。CUN07A ）

英文摘要：

A silicon-on-insulator 2× 2 Mach-Zehnder thermo-optical switch is developed based on strongly guided paired multimode interference couplers. The multimode-interference couplers were etched deeply for improving coupler characteristics such as self-imaging quality, uniformity and fabrication toierance. The proposed switch achieves good performances, including a low insertion loss of -11.0dB, a fiber-waveguide coupling loss of-4.3dB and a fast response speed measured to be 3.5 and 8.8 μs for raise and fall switching time, respectively.