中文摘要：

在微机械电子系统中,表面粗糙峰的几何特征、尺寸以及形状等对表面黏着以及摩擦特性有重要作用.为了研究粗糙度对黏着力的影响,首先用KOH溶液腐蚀硅片,得到8个粗糙度不同的样品.使用原子力显微镜（AFM）来测量样品的黏着力.分别使用两种探针来模拟不同的接触几何,第一种探针针尖为一个2μm左右的平台,另一种探针为尖探针.试验分别在干燥的手套箱内以及在空气中进行.在样品表面随机选取15个测量点,每个点测量50次,然后根据计算值,确定平面的平均黏着力以及标准差.并与Robinovich模型的计算结果作比较.结果显示：当粗糙度较小的时候,随着粗糙度增大,黏着力下降很快,这与Robinovich模型变化趋势较吻合;当粗糙度较大时,随着粗糙度增大黏着力略有增加,但不是很明显,与Robinovich模型相差较大.

英文摘要：

The geometric properties of surface asperities have important effects on surface adhesion and friction in tribological systems. In order to study the effect of roughness on adhesion, etching of the silicon wafers using KOH solution was performed to get eight samples with different roughness. In this paper, the effect of RMS on adhesion was studied by using atomic force microscope（AFM）. Two AFM probes were used to simulate different contact geometry.The one had a flat with a diameter ~ 2 μm and the other one had a sharp tip. The experiments were performed under the ambient condition and in the glove box. Then 15 points were selected for measuring the adhesion force and 50 measurements were performed on each point, and the average adhesion force and standard deviation of the sample were determined according to the calculated values. Finally, comparison on the experiment value to the calculated results from Rabinovich model was made. The results show that in case of relative small RMS, the adhesion force decreased sharply with increasing RMS, and the trends fitted the Robinovich model well, as the RMS was large, the adhesion force unobviously increased with increasing RMS, and a larger difference was found to Rabinovich model.