中文摘要：

设计一种由3个柔性铰链组成的,用于高精密磨床的微位移工作平台.通过3个柔性铰链对输入位移进行缩小,呈线性地输出,实现在工件定位过程中对珤X平移、珝Z平移、X旋转、Z旋转4个方向自由度的微小位移及角度调整的功能.优选3个柔性铰链所使用的材料,运用ANSYS仿真软件分析3个柔性铰链输入位移与输出位移、输出角位移之间的响应关系,以及工作过程中各个柔性铰链内部的应力大小.结果表明：工作台珤X方向,珝Z方向的输出输入位移比分别为0.137,0.286μm·μm（-1）;X旋转,Z旋转的输出输入位移比分别为6.516×10（-4）,2.180×10（-3）（°）·μm（-1）;在零件最大加载位移以内,输出响应与输入位移之间都呈现良好的线性关系,误差均在0.1%以内.

英文摘要：

A micro-displacement worktable with three flexible hinges has been designed in this study.Its degrees of freedom along linear（X,Z）axes,around rotary（X,Z）axes can be adjusted for fine positioning of small parts machined by high-precision grinding machine.The materials of three flexible hinges have been selected under consideration of equal life design of parts.The response relationships between output linear/angular displacement and input displacement have been analyzed by using finite element software ANSYS.The ratios of output linear displacement alongX,Zaxes to input displacement are 0.137,0.286μm·μm~（-1）,respec-tively,and those of output angular displacement around X and Z axes to input displacement are 6.516×10~（-4）,2.180×10~（-3）（°）·μm~（-1）,respectively.Within the maximum load displacement range,the relationships between output displacement and input displacement are linear,and the linearity errors are less than 0.1%.