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Influence of methane flow on the microstructure and properties of TiAl-doped a-C:H films deposited b
  • ISSN号：0142-2421
  • 期刊名称：Surface and Interface Analysis
  • 时间：0
  • 页码：924-930
  • 相关项目：复合结构碳基薄膜的制备及其摩擦学特性研究
作者： Xianjue Pang|Lei Shi|Peng Wang|Yanqiu Xia|Weimin Liu|
同期刊论文项目
复合结构碳基薄膜的制备及其摩擦学特性研究
期刊论文 6
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Structural, mechanical and tribological behavior of fullerene-like carbon film
Effects of bias voltage on structure and properties of TiAl-doped a-C:H films prepared by magnetron
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