中文摘要：

提出了一种新型的基于阳极键合的硅微圆盘多环谐振陀螺的结构设计及其制作方法。该种陀螺采用MEMS工艺制作而成,基底材料为肖特BF33玻璃,电极和谐振器均由单晶硅片加工而成,肖特BF33玻璃与单晶硅片通过阳极键合工艺键合在一起。介绍了该种陀螺的基本结构、工作原理,并进行了仿真分析,得出该种陀螺具有较小的频率分裂,表现出陀螺效应。最后,通过MEMS工艺进行了实际加工,得到了该种陀螺的实验样品。

英文摘要：

A novel type of design and fabrication of silicon micro disc resonator gyroscope based on anodic bonding was presented. This kind of gyroscope was fabricated with MEMS technology. The substrate was Schott BF33 glass, and the electrodes and the resonator were fabricated by etching a silicon wafer simultaneously. In addition, the Schott BF33 glass and the silicon wafer were bonded together with anodic bonding technology. The basic structure and working principle of the gyroscope were introduced, and then simulation analysis was conducted. It concluded that this type of gyroscope had a small frequency split and showed gyroscopic effect. At last, the silicon micro disc resonator gyroscope was fabricated with MEMS technology.