中文摘要：

设计并制作了一种液路自对准的高频硅基超声雾化器,利用有限元分析软件对器件的特性进行了系统的仿真分析,得到施加30V的激励电压后器件的阻抗特性,相应谐振频率下的位移、应力分布及变幅杆各部分振动位移随时间的瞬态变化图。结果表明,仿真分析与理论设计相符。最后,通过微机电系统（MEMS）工艺制备了谐振频率为1 MHz的硅基超声雾化器,为后期实验测试打好基础。

英文摘要：

This paper presents the design and fabrication of high-frequency,silicon-based ultrasonic atomizer which has the self-aligned fluid path.With the aid of finite element analysis software,we simulated and analyzed the characteristics of the device systematically.The characteristics of impedance,displacement and stress distributions at a certain resonant frequency,and displacement of the amplitude transformer of each part changing with the time are also obtained after the voltage of 30 Vis applied to the device.The results show that the simulation agrees with the design.Finally,we fabricate a silicon-based ultrasonic atomizer with the resonant frequency of 1 MHz using MEMS technology.All these works have paved the way for the further testing.