中文摘要：

在不同入射角度条件下，研究了60keV的O^＋离子入射孔径分别为50nm和30nm，厚度为10μmAl2O3微孔膜的角分布．实验结果表明离子透射微孔膜时发生了导向效应，随着入射角度的增大，透射于孔径大的微孔膜离子计数下降比较快，透射于孔径小的微孔膜离子计数下降比较缓慢．建立了一个初步的理论模型，对以上现象给出了较好的解释．

英文摘要：

The transmission of 60 keV O^＋ ions through Al2O3 nanocapillaries at a series of different tilt angles is measured. The capillaries with diameters of 50 nm and 30 nm respectively and 10 μm in length are used. The angular distribution and the transmission yields of transported ions are investigated. Our results indicate both the existence of guiding effect when ions pass through the capillary and a significant dependence on the tilt angle. The results also show that the transmission yield increases as the diameter of capillary decreases, and the theoretical model used in our work explains it well.