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Experimental study of novel microactuator based on photothermal expansion
  • ISSN号:1673-1905
  • 期刊名称:《光电子快报:英文版》
  • 时间:0
  • 分类:TN256[电子电信—物理电子学]
  • 作者机构:[1]State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou, 310027, China
  • 相关基金:This project has been supported by the National High Technology Research and Development Program of China (Grant No. 2006AA04Z237)
中文摘要:

一个新奇 photothermal 开车方法被建议。新奇 photothermal 微致动器(PTA ) 与这个方法被开发。我们与不同宽度介绍了不对称的广泛的手臂的偏转机制。当红外线的激光的一根横梁照耀时,特定的表面区域的不同的率控制的手臂,不同增加温度和 photothermal 扩大引起放大侧面的偏转。1000 渭 m 长度微致动器的一个原型被使用一个 excimer 激光 micromachining 系统,并且用聚丙烯材料生产。实验被执行了检查偏转的可行性,与象激活的外部力量来源的一根激光二极管(650 nm ) 微致动器。结果证明没有严格地考虑尺寸或照耀的轻点的地点,致动器罐头实际上产生明显的侧面的偏转。偏转地位微致动器能被从 0 mW 把激光力量改变到 10 mW 从 0 渭 m 遥远地控制到 14.33 渭 m。这种新奇 PTA 为操作相当简单、方便。它将为 micro/nano-technology 并且与大排水量 / 使活动力量和 remote controlling 的域里的应用程序是相当有用的。

英文摘要:

A novel photothermal drive method was proposed. A novel photothermal micro-actuator (PTA) was developed with this method. We introduced the deflection mechanism of the asymmetric expansive arms with different widths. When a beam of infrared laser irradiates the arms, the different increase temperature and photothermal expansion controlled by the different rates of specific surface area cause a magnified lateral deflection. A prototyping micro-actuator of 1000 μm length was manufactured by using anexcimer laser micromachining system, and using polypropylene material. Experiments have been carded out to check the feasibility of deflection, with a laser diode (650 nm) as the external power source to activate the micro-actuator. The results show that the actuator can practically generate an obvious lateral deflection without considering the size or the location of the irradiated light spot strictly. The deflection status of the micro-actuator could be controlled remotely from 0 μm to 14.33 μm by changing the laser power from 0 mW to 10 mW. This kind of novel PTA is quite simple and convenient for operation. It will be quite useful for the applications in the fields of micro/nano-technology and with large displacement/actuation force and remote controlling.

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期刊信息
  • 《光电子快报:英文版》
  • 主管单位:
  • 主办单位:天津理工大学
  • 主编:巴恩旭
  • 地址:天津市西青区宾水西道391号
  • 邮编:300384
  • 邮箱:Oelett@yahoo.com.cn
  • 电话:022-23679707 23657134
  • 国际标准刊号:ISSN:1673-1905
  • 国内统一刊号:ISSN:12-1370/TN
  • 邮发代号:6-198
  • 获奖情况:
  • 中国期刊方阵“双效”期刊
  • 国内外数据库收录:
  • 荷兰文摘与引文数据库,美国工程索引,英国科学文摘数据库
  • 被引量:147