中文摘要：

在z切LiNbO3晶体上进行飞秒激光刻写通道光波导的实验研究。利用光学显微镜研究了光波导的微观结构;在633 nm波长下,端面耦合得到光波导的近场光强分布,波导区为飞秒激光聚焦的区域,TE和TM偏振下都形成了光波导模。研究了激光扫描速度和脉冲能量对刻写质量的影响,结果发现,激光脉冲能量在2.0μJ左右、扫描速度在0.62~2.00 mm/s间时刻写的通道具有较好的波导特性。

英文摘要：

Waveguide structures are fabricated in z-cut LiNbO3 using focused femtosecond laser pulses.Microstructural modifications were investigated by means of the optical microscopy.And the near-field intensity distributions at 633 nm of the waveguide′s modes were obtained.The results show that the guiding occurs in a material modification region created at the focus.And the waveguide modes were demonstrated under TE and TM polarizations.The effects of scanning speed and laser energy on the optical waveguide quality were examined.The results show that the channel,which was processed under 2 μJ pulse energy and the scanning speed of 0.62-2.0 mm/s,has good waveguide features.