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Ultra-violet light assisted reactive RF magnetron sputtering deposition of AlN thin films at room te
  • ISSN号：0167-577X
  • 期刊名称：Materials Letters
  • 时间：2012.7.7
  • 页码：25-28
  • 相关项目：集成化射频高Q薄膜体声波谐振器
作者： Feng, Bin|Dong, Shurong|Jin, Hao|Zhou, Jian|Yang, Yi|Ren, Tianling|Luo, Jikui|Wang, Demiao|
同期刊论文项目
集成化射频高Q薄膜体声波谐振器
期刊论文 38 会议论文 17 专利 17
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