中文摘要：

碳基薄膜作为一种新型的固体润滑材料其结构设计与调控一直是研究的重点与热点。近年来,在利用物理气相沉积法制备金属-碳多元薄膜时发现原位自形成纳米多层结构的奇特现象,研究表明在薄膜中形成纳米多层结构,可以很好地从微观尺度上增强薄膜材料的机械与摩擦学性能,从而利用纳米多层结构的自形成特性使润滑材料实现强韧一体化及多环境适应性。主要综述了在碳基薄膜制备过程中,复合元素、制备技术和沉积参数3种主要的影响因素分别对自形成纳米多层结构薄膜的生长和微观结构的影响规律,探讨了薄膜中纳米多层结构的自形成机制,展望了碳基薄膜自形成纳米多层结构的发展前景。

英文摘要：

The structure design and control of carbon-based film as a new kind of lubricating material always are the hot topics that researchers focus on.In recent years,a distinctive phenomenon of spontaneous formation of nano-multilayers in metal-carbon multiple films has been observed during the physical vapor deposition process.It is well known that the formation of peculiar multilayers nanostructures can significantly enhance film mechanical and tri-bological properties at the macro-scale.Therefore,we can utilize the spontaneous formation of nano-multilayers to im-prove the hardness,toughness and environmental self-adaption of carbon-based film.In this work,the influence of the three crucial factors including composite elements,fabrication technologies,deposition parameters on the growth and microstructure of spontaneous formation of nano-multilayers in carbon-based films is reviewed,and the spontaneous formation mechanism is discussed.At the end,the potential development of spontaneous formation of nano-multila-yers is prospected.