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中文摘要：
本文利用光学显微镜和扫描电镜对248nm准分子强激光辐照HgCdTc和Si晶片的表面损伤形貌和损伤过程进行了对比分析，结果表明在248nm准分子激光作用下，HgCdTe材料主要表现为解离剥蚀破坏和熔融烧蚀破坏，准分子激光对其损伤机理既包含光化学作用也包含光热作用；而Si材料则主要表现为熔融烧蚀破坏，准分子激光对其损伤机理主要为光热作用.
英文摘要：
In this work, the surfaces of HgCdTe and Si materials irradiated by 248nm excimer laser are examined by an optical microscope and a scoanning electron microscope. Through comparative analysis of the damage surfaces, it is found that the damage mechanism of the HgCdTe crystal is very different from that of the Si. The former incorporates both photochemical and photothermal effect. However, the later is dominantly photothermal effect.
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