中文摘要：

针对如何高效稳定地获得粗糙度值小、少无亚表面损伤、低成本的超光滑表面的问题,分析了原子级超光滑表面加工技术的加工原理,详细阐述了几类非接触式抛光方法的加工原理及国内外最新研究进展,并着重论述了声悬浮抛光和磨料水射流抛光的研究现状。接着,在此基础上对这几类加工方法各方面的优缺点进行了对比总结。最后,针对目前超光滑表面加工技术存在的不足,指出了超光滑表面加工技术有待进一步研究的方向。研究结果表明,采用非接触式的抛光方法,对加工过程加以合理的控制,可大大降低工件表面粗糙度,改善亚表面的损伤情况;目前非接触式抛光普遍对抛光设备精度要求较高,减少加工成本是超光滑表面加工技术进行大规模推广的迫切要求。

英文摘要：

Aiming at solving the problem of how to reduce the cost of the production and steadily obtain the perfect workpiece with less subsurface damage, the machining mechanism of atomic ultra-smooth surface technology was analyzed, the machining mechanism and the latest research of the existing non-contact polishing methods were summarized, especially about the research of acoustic suspension polishing and abrasive jet polishing. Furthermore, their advantages and disadvantages were also compared in all aspects. Finally, according to the existing problems of ultra-smooth surface polishing technology, the probable further study of the technology was proposed. The result indicates that a- dopting the non-contact polishing method and controlling the machining process reasonably can greatly reduce the roughness of workpiece and improve the sub-surface damage. The requirements of polishing equipment precision are higher for the non-contact polishing at present, which requires reducing the manufacturing cost to largely promote the ultra-smooth surface processing technology.