中文摘要：

大气压低温等离子体射流是一种新型的等离子体放电技术,它具有运行温度低、可控性好、操作简单等特点,但其产生的等离子体体积小,不适合大面积处理。对单个等离子射流源进行一维、二维上的扩展形成阵列结构,可产生大面积低温等离子体,具有更强的处理灵活性和实用性。等离子体射流阵列成为近年来研究热点。本文综述了大气压等离子体射流阵列的研究现状,总结了各种射流阵列的产生结构和组成阵列的射流单元的结构以及驱动电源类型等,分析了射流阵列放电特性及诊断方法,介绍了射流阵列的典型应用效果,讨论了射流阵列的产生机理以及研究中存在的一些需要解决的问题。

英文摘要：

The latest progress of the non-thermal, atmospheric pressure plasma-jet array, with quite a few technical strengths, including but not limited to the low operating temperature, easy operation, good controllability and wide plasma coverage, was tentatively reviewed in a thought provoking way. The discussions centered on： i） The structures of a plasma jet unit and jet array （especially 1-D and 2-D arrays）, their plasma generation modes and power supplies; ii） The evalua- tion techniques of the discharge characteristics and conventional diagnostic methods of the plasma jet arrays, and iii） Typ- ical applications of the plasma jet arrays in modification of solid surfaces, thin film synthesis, and biological and medical research, etc. In addition, the plasma generation mechanisms, technological problems and development trends of the plasma jet arrays were also briefly discussed.