中文摘要：

钢笔纳米刻蚀技术（Fountain pen nanolithography,FPN）是近年来发展起来的一种新型的基于原子力显微镜（Atomic force microscope,AFM）的扫描探针刻蚀技术,具有加工结构精度高、加工过程操作性强、对加工环境要求低、持续书写等优点.FPN刻蚀过程主要受探针的孔径大小、空气湿度、接触时间、书写速度、墨水的特性等因素影响.在介绍FPN相关原理及影响因素的基础上,综合介绍了包括电化学FPN技术（Electrochemical FPN,EcFPN）和主动控制技术FPN（Active FPN,AFPN）在内的FPN相关技术研究的最新成果及其在生物领域、微电子领域和光学器件方面的相关应用.

英文摘要：

Fountain pen nanolithography （FPN） is a new scanning probe technology based on AFM,and possesses outstanding performances such as high accuracy,strong operability,general environment requests,continued writing etc.The process of FPN is mainly affected by the aperture size of the probe,air humidity,contact time,writing speed,ink features and so on.The theory of FPN and its influence factors are introduced.Then the latest achievements including electrochemical FPN and active FPN are presented.Finally,the various applications of FPN in biology,micro electronics and optical devices are reviewed.