中文摘要：

用溶胶．凝胶方法在La0.5Sr0.5CoO3底电极上制备了纯的和10％A位Nd替代的BiFeO3薄膜。对薄膜的结构、形貌和电性质进行了研究。XRD研究表明两薄膜呈随机取向。而SEM测试结果表明，通过Nd替代，构成薄膜的晶粒显著减小，表面出现了针孔。铁电性研究表明，通过Nd替代，薄膜的铁电性得到显著增强，剩余极化强度由1．87μC/cm^2。增加到3．11μC/cm^2。而漏电流特性测试表明，Nd替代有效地限制了BiFeO3薄膜在正向偏压下的漏电流。

英文摘要：

BiFeO3 film and 10 % Nd A site substituted BiFeO3 films were prepared on La0.5Sr0.5CoO3bottom electrode by sol-gel process. Structural, morphological and electrical properties were studied. XRD showed that the two films adopt random orientation. STEM results showed that the crystal grains were reduced by the substitution of Nd. The study of ferroelectricity showed that it was substantially enhanced, since the remnant polarization increased to 3.11 μC/cm^2 from the original 1.87μC/cm^2 through Nd substitution. Moreover, leakage current was reduced through Nd substitution under the positive applied field.