中文摘要：

通过化学吸附自组装的方法,将小分子量的偶氮苯分子自组装到平滑硅基底表面,其表面接触角为83.7°.微结构化硅基底表面的偶氮苯单层膜上表现出超疏水的特性,接触角达到了151.9°.经过紫外光照射后,该表面的接触角没有发生明显的降低.

英文摘要：

A kind of azobenzene with small molecule weight was assembled on the silicon substrate by a chemical route. Rough silicon substrates were prepared by photolithography and the inductive coupling plasma deep etching technique. The as-prepared film shows the super-hydrophobicity, the contact angle of which is about 151.9°. After exposure to UV light, no obvious change of the contact angle was observed.