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Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orien
  • ISSN号：0021-8979
  • 期刊名称：Journal of Applied Physics
  • 时间：0
  • 页码：094511-094511
  • 相关项目：高频谐振器用压电薄膜的制备及取向与性能关系研究
作者： Lifeng Qin|Qingming Chen|Hongbin Cheng|Qian Chen|Jing-Feng Li|Qing-Ming Wang|
同期刊论文项目
高频谐振器用压电薄膜的制备及取向与性能关系研究
期刊论文 13 会议论文 1
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