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中文摘要：
采用氧气等离子体（OP）处理对氧化铟锡（ITO）薄膜进行表面改性,通过原子力显微镜（AFM）、X射线光电子能谱（XPS）和四探针等测试手段对薄膜样品进行表征,研究了OP处理对ITO表面性质的影响。实验结果表明OP处理有效去除了ITO表面的污染物,优化了ITO表面的化学组分,降低了ITO表面的粗糙度和方块电阻,改善了ITO的表面形态。与此同时,通过XPS监测研究了OP处理后ITO表面化学组分随老化时间的变化,结果显示经过优化的化学组分随老化时间增加而逐渐退化。另外,以OP处理后经过不同老化时间的ITO样品作为空穴注入电极,制备了有机电致发光器件（OELD）,通过测试器件的电压-电流-亮度特性,进一步研究了ITO表面性质对于OELD光电性能的影响。
英文摘要：
Surface modification was carried out on indium-tin oxide（ITO） thin films by means of oxygen plasma（OP） treatment.The effects of OP treatment on the surface properties of ITO thin films were investigated by Xray photoelectron spectroscopy（XPS）,atomic force microscopy（AFM）,and four-point probe techniques.Experimental results show that the OP treatment removes the hydrocarbon contaminant from the ITO surfaces,decreases the surface roughness and sheet resistance,optimizes the surface stoichiometry and improves the surface morphology.Chemical composition of the OP-treated surfaces was then monitored as a function of time elapsed after treatment and quantified.It is observed that the improved chemical composition tended to decay with the increment of time.Furthermore,the organic electroluminescent devices（OELDs） were fabricated using the treated and untreated ITO samples as hole-injecting electrodes,and the influence of surface properties of ITO electrodes on the performance of OELDs was studied with respect to the turn-on voltage,driving voltage,electroluminescent luminance and efficiency.
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