中文摘要：

对比研究了产线上多晶硅太阳电池背表面刻蚀对其光电转换性能的影响。示范性实验结果表明：多晶硅太阳电池背表面刻蚀能够改善其短路电流,从而相应的光电转换效率提升了约0.1%。依据多晶硅太阳电池背表面刻蚀前后的扫描电镜（SEM）形貌、背表面漫反射光谱及完整电池片外量子效率的测试结果,改进的光电转换的原因可能源于背表面刻蚀“镜面”化有利于太阳光子在背表面内反射和改进印刷Al浆与背表面覆盖接触。背表面刻蚀与当前晶硅电池产线工艺兼容,能够提升电池片的光电转换效率,是一种可供选择的产线升级工艺。

英文摘要：

The effect of back surface etching on power conversion efficiency in multi-crystalline silicon so- lar cells is explored. The experimental results show that the short-circuit current is improved by the etching, and the power conversion efficiency is increased by 0. 1%. Before or after the etching, the scan- ning electron microscope （SEM） morphology, the reflectance spectra of back surface and the external quantum efficiency for multi-crystalline silicon solar cells are investigated to understand the enhanced power conversion efficiency. It may be attributed to that the etching leads to a ＂mirror＂ back surface in multi-crystalline silicon solar cells, which is beneficial to solar photons internal reflection and aluminum paste contact with the back surface. The back surface etching is an alternative up-grade process for pro- duction line of multi-crystalline silicon solar cells.