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中文摘要：
微悬臂梁由于其体积小、响应速度快、灵敏度高和易于集成等特点,已迅速发展成为一门新兴的传感器技术。本文简要介绍了微悬臂梁传感器的工作原理和信号读出方法,概括了近年来它在液体环境中的研究现状,并对其性能特点和局限性进行了讨论,展望了该类型传感器今后的研究趋势。
英文摘要：
Microcantilever,because of its small size,fast response,and high sensitivity etc.,has rapidly developed into a new sensor technology.This review describes the working principle of microcantilever sensors,the signal readout method and the factors affecting sensitivity.The performance,application and limitation of microcantilever in aqueous solution in recent years are summarized.The future challenges and prospects in the application of microcantilever are also discussed.
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