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中文摘要：
设计了一种基于石英增强光声光谱技术的痕量气体传感器，用来检测非纯氢气中的痕量甲烷浓度。传感器被配置了一个微型谐振腔，能够在空间上对声波进行限制，用以增强信号幅值。在这种配置和27kPa的最优气压下，获得的甲烷探测灵敏度为3．2ppm（1S平均时间），相应的归一化噪声等效吸收系数（1σ）为2.45×10^-8cm^-1W/Hz^1/2。
英文摘要：
A compact gas sensor based on quartz-enhanced photoacoustic spectroscopy （QEPAS） was devel- oped for trace methane quantification in impure hydrogen. The sensor is equipped with a microresonator to confine the sound wave and enhance QEPAS signal. The normalized noise-equivalent absorption coefficients （1σ） of 2.45×10^-8cm^-1W/Hz^1/2 for CH4 detection at 27 kPa were demonstrated with the QEPAS sensor configuration, which corresponds to the detection sensitivity of 3.2 ppm （1 s averaging time）.
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