中文摘要：

在应用于光器件封装中的六自由度柔性并联运动平台中,柔性铰链的性能是制约运动平台大行程和高精度的重要因素。根据卡氏定理和Lobatto求积公式,建立圆角直梁型柔性铰链力学模型,推导出铰链的柔度矩阵。同时提出了评价柔性铰链性能的参数,即转动能力θ和转动精度σ。在此基础上,计算并分析了圆角直梁型柔性铰链的结构参数L、d、r对其转动能力θ和转动精度σ的影响,并通过有限元分析法进行验证。结果表明,提升L和r、降低d可以提升柔性铰链的性能,为运用于光器件封装的柔性并联运动平台设计提供了有力依据。

英文摘要：

In the six degrees of freedom flexible parallel platform using in optoelectronics packaging, the performance of the flexible hinge is an important influence factor on moving platform workspace and precision. According to Castigliano＇s theorem and Lobatto quadrature formula, the mechanical model of the comerfilleted is established and the compliance matrix of flexible hinge is deduced. At the same time, the performance parameters of flexible hinge are defined, they are the rotation ability 0 and rotation accuracy σ. On this basis, the impact of comer - filleted flexible hinge structural parameters L, d, r on its rotational capacity 0 and rotational accuracy cr is calculated and analyzed, and it is verified by the finite element method. The results show that enhancing L and r, reducing d can improve the performance of flexible hinge. A strong basis for the flexible parallel motion platform design using in optoelectronics packaging is orovided.