中文摘要：

在光控相控阵雷达系统中,光电探测器起着重要的作用,缺乏大功率高速光电探测器是制约光控相控阵雷达实用的瓶颈。近年来提出的垂直方向耦合光波导探测器,在满足超模匹配条件下,能解决光电流分布不均匀的问题,从而实现大功率高速工作。本文在选定了垂直方向耦合器结构的基础上,根据BeemProp软件模拟仿真结果确定满足超模匹配条件的结构参数,然后进一步用有效折射率法验证了此结构参数仍满足超模匹配条件。所采用的方法为设计大功率高速光电探测器提供了参考。

英文摘要：

Photodetector plays an important role in the optical phased array radar.Lacking of high-power and high-speed optical detector is the bottleneck that restricts the practical application of the optical phased array radar.The direction coupled photo diode,that has been put forward recent years,can solve the problem of uneven distribution of photocurrent under the super mode matching condition.As a result,the new photodetector must be able to work at high-power and high-speed.In this paper,based on the structure of vertical direction coupled waveguide detector,we determine the structural parameters which meet the super mode matching condition by using the simulation results of Beemprop software.In addition,using the effective index method,we verify that the structural parameters still meets the super mode matching condition.The method used in this paper provides a reference for the design of high-power and high-speed photodetector.