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Multifocus with small size, uniform intensity, and nearly circular symmetry
  • ISSN号：0146-9592
  • 期刊名称：Optics Letters
  • 时间：0
  • 页码：2200-2202
  • 语言：英文
  • 相关项目：浸没式光刻中双折射偏振成像的机理研究
作者： Dong, Xiangmei|Weng, Xiaoyu|Zhuang, Songlin|Sui, Guorong|Yang, Ning|Guo, Hanming|
同期刊论文项目
浸没式光刻中双折射偏振成像的机理研究
期刊论文 37 会议论文 2 专利 8
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