中文摘要：

为准确计算圆形复合薄膜压电振子的弯曲变形量，利用弹性薄板变形理论建立了压电振子弯曲变形挠曲线方程，对影响振子变形量的参数进行了数值模拟分析，得到增大振子变形量的方法，通过实验测试了不同尺寸振子准静态振幅和幅频特性。分析和测试结果表明：为了增大振子变形量，可增大驱动电压，增大陶瓷片与基板直径比；当陶瓷片与基板厚度比为0．8时，振子变形量最大；在保证黏结强度的情况下，胶层厚度越小，振子变形量越大；圆形压电振子在谐振点处振幅仅为静态变形量的5％～10％，准静态振幅为静态变形量的50％～60％。

英文摘要：

The bending flexure curve equation of circular piezoelectric vibrator was investigated according to deformation principle of elastic sheet so as to calculate its deflection exactly. Based on the flexure curve equation, numerical analysis about the relationships among structural parameters, material characteristics and amplitude was carried out, and the way to enhance amplitude of the vibrator was found out. Finally, experiments about quasi static amplitude and frequency--amplitude characteristics of different size vibrators were carried out to testify these relationships. According to the results from analyses and experiments, means such as increasing actuate voltage and diameter ratio of ceramic and substrate can enhance the amplitude of the vibrator. As ceramic and substrate thickness ratio of 0.8, the amplitude comes to maximum;to ensure that of the bond strength, the thinner of the glue layer,and the greater of the amplitude of the vibrator. The resonant amplitude and quasi static amplitude is about 5%-10% and 50%-60% of the static deformation respectively.