中文摘要：

为了利用光学非接触方法测量表面横向形貌参数,从Beckmann-Kirchhoff标量散射理论出发,分析并得到了高斯粗糙表面激光散射能量的立体角分布特征与轮廓均方根斜率之间的关系。提出了散射光的两个特征值：经度及纬度辐射立体角密度矩,用以提取散射光能量立体角分布情况,并给出了利用数字图像信号在非傍轴远场条件下测量和计算特征值的方法。实验证明：给出的特征参数和测量方法能够得到激光散射立体角分布特征并可用于测量粗糙表面轮廓均方根斜率。

英文摘要：

In order to measure the surface horizontal profile parameters with optical non-contact method,based on the scalar scattering theory of Beckmann-Kirchhoff,the relationship between the solid angle distribution characteristics of laser scattering radiance from a Gaussian rough surface and the root mean-square slope of profile was analyzed and obtained.Two feature values,i.e.the moments of solid angle distribution of longitude and latitude radiance,which were proposed to describe the laser scattering distribution of solid angle.The measurement and computation methods for the proposed feature values in condition of nonparaxial far field scattering using digital image signal were presented.The experiments prove that with the proposed feature parameters and measurement approach,the scattering light distribution features of solid angle can be obtained and the root-mean-square slope of profile of rough surfaces can be measured.