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Annealing effects on the structure and electrical characteristics of amorphous Er(2)O(3) films
  • 期刊名称：Chinese Physics B
  • 时间：0
  • 页码：3542-3545
  • 语言：英文
  • 相关项目：非晶稀土氧化物高k栅介质材料的制备及物理特性研究
作者： Wang Jia-Le|Fang Ze-Bo|Zhu Yan-Yan|Jiang Zui-Min|
同期刊论文项目
非晶稀土氧化物高k栅介质材料的制备及物理特性研究
期刊论文 26 专利 1
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