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Two-surface-plasmon-polariton-absorption based lithography using 400?nm femtosecond laser
ISSN号:0003-6951
期刊名称:Applied Physics Letters
时间:2014.2.26
页码:081115-081115
相关项目:基于金属/介质纳米结构的表面等离子激元集成回路
作者:
Yunxiang Li, Fang Liu, Yu Ye, Weisi Meng|Kaiyu Cui, Xue Feng, Wei Zhang, and Yidong Huang|
同期刊论文项目
基于金属/介质纳米结构的表面等离子激元集成回路
期刊论文 53
会议论文 12
专利 3
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