中文摘要：

采用双晶片型压电执行器,对微夹钳进行了结构设计.根据压电陶瓷晶体变形的本质是极化及极化与表面电荷的关系,提出了基于积分电荷的钳指位移与夹持力的自感知方法.基于Jan G.Smits的压电悬臂梁静态模型,建立了钳指位移与夹持力的自感知数学模型.实验结果表明,静态或低频情况下,自感知的钳指位移同传感器获得的钳指位移具有很好的一致性;自感知方法所获得的夹持力（最大值为0.072 N）大于微量电子天平的测量结果（最大值为0.052 N）,通过对自感知夹持力曲线进行相应的系数修正,自感知方法所获得的结果能很好地反映夹持力的真实大小.

英文摘要：

A new micro-gripper based on piezoelectric bimorph was designed.Inspired by the fact that the substance of piezoelectric crystal deformation is polarization and the relation between polarization and induced surface charge,the griping force and displacement self-sensing method based on integral charge was proposed,and the mathematical models of griping force and displacement referring to the Smits＇ piezoelectric cantilever static model was established.The results show that the displacement obtained by self-sensing method and by independent sensor had good consistency in the case of static or low frequency.By using electronic micro balance,experimental results verified the effectiveness of the self-sensing griping force method.Although the griping force obtained by self-sensing method （the maximum was 0.072 N） was greater than the one by electronic micro balance （the maximum was 0.052 N）,the self-sensing force results could well reflect the true griping force by coefficient correcting of the force.