位置：成果数据库 > 期刊 > 期刊详情页
Effects of the Polishing Variables on the Wafer-Pad Interfacial Fluid Pressure in Chemical Mechanica
  • ISSN号：0013-4651
  • 期刊名称：Journal of the Electrochemical Society
  • 时间：2012
  • 页码：342-348
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Zhao Dewen|He Yongyong|Wang Tongqing|Lu Xinchun|Luo Jianbin|
同期刊论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 85 会议论文 3 获奖 22 专利 63
同项目期刊论文
抛光垫特性及其对300mm晶圆铜化学机械抛光效果的影响研究
微米级沟槽表面薄膜的制备及减阻性能研究
300mm晶圆化学机械抛光机关键技术研究与实现
Modification on the tribological properties of ceramics lubricated by water using fullerenol as a lu
载荷对壁虎刚毛束的摩擦各向异性特性影响的实验研究
A study of surface texturing of carbon steel by photochemical machining
Beam shaping system design using double freeform optical surfaces
Tribo-chemical Behavior of Copper in Chemical Mechanical Planarization
Material removal mechanism of copper CMP from a chemical-mechanical synergy perspective
Effect of Surface Energy on the Wear Process of Bulk-Fabricated MEMS Devices
Contact stress non-uniformity of wafer surface for multi-zone chemical mechanical polishing process
Optimization of design of experiment for chemical mechanical polishing of a 12-inch wafer
Numerical and experimental investigation on multi-zone chemical mechanical planarization
纳米级润滑膜分子排列取向的拉曼光谱表征技术
Effect of contact deformation on contact electrification: A first-principles calculation
Kinematic optimization for chemical mechanical polishing based on statistical analysis of particle t
Optimal design of a main driving mechanism for servo punch press based on performance atlases
Controllable interfacial adhesion applied to transfer light and fragile objects by using gecko inspi
Tunable water-based lubrication behavior of alkyl- and fluoroalkyl-silanes
Energy Dissipation in atomic-scale Friction
Type synthesis of 2T1R-type parallel kinematic mechanisms and the application in manufacturing
Effects of PFPE Lubricant Properties on the Critical Clearance and Rate of the Lubricant Transfer fr
Thin liquid film lubrication under external electrical fields: Roles of liquid intermolecular intera
Achievement of a near-perfect smooth silicon surface
Tunable tribological properties in water-based lubrication of water-soluble fullerene derivatives vi
Ab initio study of the friction mechanism of fluorographene and graphene
Adhesion resistance surfaces against clay resulting from biomimetic adaptation
Friction and wear behaviors of compacted graphite iron with different biomimetic units fabricated by
Preparation of poly(N-isopropylacrylamide) brush bonded on silicon substrate and its water-based lub
Direct observation of cavitation phenomenon and hydrodynamic lubrication analysis of textured surfac
The rheological properties of magnetic field excited magnetic powders sheared between two parallel p
Wafer bending/orientation characterization and their effects on fluid lubrication during chemical me
Influence of ytterbium on the electrochemical property of PbCaSn alloy in sulfuric acid solution
Influence of potentiostatic aging, temperature and pH on the diffusivity of a point defect in the pa
Influences of welding parameters on mechanical properties of AZ31 friction stir spot welds
亚音速飞行器壁面沟槽减阻研究与应用
The Role of Hydroxyethyl Cellulose (HEC) in the Chemical Mechanical Planarization of Copper
Electrochemical investigation of copper passivation kinetics and its application to low-pressure CMP
Effect of slurry injection position on material removal in chemical mechanical planarization
A flexible nanobrush pad for the chemical mechanical planarization of Cu/ultra-low-kappa materials
氧化硅团簇切削单晶硅粗糙峰的分子动力学模拟研究
Structure parameter of electrorheological fluids in shear flow
An experimental study on the normal stress of magnetorheological fluids
Probing particle movement in CMP with fluorescence technique
Aminosilanization nanoadhesive layer for nanoelectric circuits with porous ultralow dielectric film
Progress in experimental study of aqueous lubrication
Investigation on growth process and tribological behavior of mixed alkylsilane self-assembled molecu
Transient response of sheared magnetic powder excited by a stepwise magnetic field and its compariso
An optimized amplitude-weighting wavefront correction algorithm in laser systems
微米结构聚合物涂层的制备及减阻性能研究
Characteristics of the wear process of side-wall surfaces in bulk-fabricated Si-MEMS devices in nitr
Electrospreading of dielectric liquid menisci on the small scale
The generation of nano sandwich sheets in ring area around cavitation erosion pit on the surface of
小型高速水洞实验段形状对流场影响的数值模拟
Role of external magnetic field during friction of ferromagnetic materials
Direct-liquid-cooled Nd:YAG thin disk laser oscillator
A comparative study between graphene oxide and diamond nanoparticles as water-based lubricating addi
基于微空泡效应的疏水性展向微沟槽表面水下减阻研究
船用减阻聚合物涂层的形成机制
化学机械抛光传输机器人模型及LQ控制
化学机械抛光传输机器人晶圆抓取自适应控制方法
Tunable tribological properties in water-based lubrication of water-soluble fullerene derivatives via varying terminal groups